Scanning Probe Microscope Ntegra Aura

Product Features

  • NTEGRA Aura allows measurements in low vacuum environment – 10-2 torr with the following advantages. Due to a cantilever Q-factor increase measurements are more sensitive, and they are possible without bad influence of surface adsorbate.
  • Additional possibilities are provided by a temperature table with sample heating up to 300 °C and the accuracy of temperature maintenance 0.05 °C.
  • Measurements in a controlled gas atmosphere are possible as well.

Scanning probe Microscopy

STM/ AFM (contact + semi-contact + non-contact) / Lateral Force Microscopy / Phase Imaging/Force Modulation/ Adhesion Force Imaging/ Magnetic Force Microscopy/ Electrostatic Force Microscopy/ Scanning Capacitance Microscopy/ Kelvin Probe Microscopy/ Spreading Resistance Imaging/ Lithography: AFM (Force and Current), STM

Specification

Scan type

Scanning by sample

Scanning by probe*

Sample size

Up to 40 mm in diameter, to 15 mm in height

Up to 100 mm in diameter, up to 15 mm in height

Sample weight

Up to 100 g

Up to 300 g

XY sample positiniong range

5x5 mm

Positioning resolution

Readable resolution -5 um
Sensitivity -2 um

Scan range

100x100x10 um
3x3x2,6 um

100x100x10 um
50x50x5 um

Up to 150x150x15 um**(DualScan™mode)

Non linearity, XY
(with closed loop sensors)

≤ 0.1%

≤ 0.15%

Noise level, Z
(RMS in bandwidth 1000Hz)

With sensors

0.04 nm (typically),
≤ 0.06 nm

0.06 nm (typically),
≤ 0.07 nm

Without sensors

0.03 nm

0.05 nm

Noise level, XY*** 0.2 nm
(RMS in bandwidth 200Hz)

With sensors

0.2 nm (typically),
≤ 03 nm (XY 100 um)

0.1 nm (typically),
≤ 0.2 nm

Without sensors

0.02 nm (XY 100 um),
0.001 nm (XY 3 um)

0.01 nm

Closed-Loop Equivalent™

Noise level, XY
(RMS in bandwidth 200Hz)

0.012 nm (XY 3 um)

Noise level, Z
(RMS in bandwidth 1000 Hz)

0.02 nm

Zoom accuracy

5% typically

Optical viewing system

Optical resolution

1 um

3 um

Field of view

4.5 - 0.4 mm

2.0 - 0.4 mm

Continuous zoom

Available

Available

Temperature control

Range

From RT to +150°C

Stability

±0.005°C (typically), ≤ ±0.01°C

Vacuum system

Pressure

10-2Torr

Vibration isolation

Active

0.7-1000 Hz

Passive

Above 1 kHz

* Scanning head can be configured to serve as a stand-alone device for specimens of unlimited sizes.
** Optionally can be expanded to 200x200x20 m.
*** Built-in capacitive sensors have extremely low noise and any area down to 50x50 nm can be scanned with closed-loop control.

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Scanning Probe Microscope Ntegra Maximus

Product Features

  • NTEGRA Maximus basement is a changeable center unit with a motorized stage. Sample movement is possible within 50mm by X,Y and within 0-360 degrees under rotation.
  • Automated measurements of many small samples are also possible with NTEGRA Maximus enabling high throughput screening.
  • Macro language tool included in the base system provides highest possible flexibility in a research procedure selection and tuning.
  • Scanning AFM head with capacitive sensors gives the system metrological properties.

Scanning Probe Microscopy

AFM (contact + semi-contact + non-contact) / Lateral Force Microscopy / Phase Imaging/Force Modulation/ Adhesion Force Imaging/ Magnetic Force Microscopy/ Electrostatic Force Microscopy / Scanning Capacitance Microscopy/ Kelvin Probe Microscopy/ Spreading Resistance Imaging/ Lithography: AFM (Force and Current)

Specification

Sample size

Up to 100 mm in diameter, up to 15 mm in height

Sample weight

Up to 1 kg

XY sample positiniong range

Linear movement range

50 mm

Positioning resolution

2.5 um

Rotary movement range

360°

Positioning resolution

0.005°

Scan range

50x50x5 um

Sample holder

Vacuum chuck

Non-linearity, XY
(with closed-loop sensors)

≤ 0.15%

Noise level, Z
(RMS in bandwidth 1000Hz)

With sensors

0.06 nm (typically), ≤ 0.07 nm

Without sensors

0.05 nm

Noise level, XY*
(RMS in bandwidth 200Hz)

With sensors

0.1 nm (typically), ≤ 0.2 nm

Without sensors

0.01 nm

Linear dimension estimation error
(with sensors)

±0.5%

Optical viewing system

Optical resolution

1 um/3 um

Field of view

4.5-0.4 mm

Continuous zoom

Available

Vibration isolation

Active

0.7-1000 Hz

Passive

Above 1 kHz

Built-in capacitive sensors have extremely low noise and any area down to 50x50 nm can be scanned with closed-loop control.

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Scanning Probe Microscope Ntegra Prima

Product Features

  • Equipped with a replaceable scanner with integrated capacitance sensors. A scan range of 100x100x12 um is available.
  • XY nonlinearity: 0.05% of Peak-to-Peak by 2 value, after correction.
  • Position repeatability in the X-Y plane is maintained with an accuracy of 10-20 nm in full scan range.
  • The DualScan mode is performed with the use of the replaceable lower scanner (100x100x12 um) and another (100x100x10 um) upper scanner, which gives the total scan range of 200x200x22 um.
  • The PNL controller and the mechanical parts of the PNL NTEGRA can operate in high-frequency modes, up to 5 MHz. This makes it possible to use the system both for AFAM applications and for operations with high-frequency cantilevers.
  • This system can be used in research of high-resistance materials such as thin dielectric layers on semiconductors, DLC and piezo-films, conductive polymers etc.

Scanning probe Microscopy

In air&liquid: AFM (contact + semi-contact + non-contact) / Lateral Force Microscopy / Phase Imaging/ Force Modulation/ Adhesion Force Imaging/ Lithography: AFM (Force) In air only: STM/ Magnetic Force Microscopy/ Electrostatic Force Microscopy/ Scanning Capacitance Microscopy/ Kelvin Probe Microscopy/ Spreading Resistance Imaging/ Lithography: AFM (Current), STM/ AFAM (optional)

Specification

Scan type

Scanning by sample

Scanning by probe*

Sample size

Up to 40 mm in diameter, to 15 mm in height

Up to 100 mm in diameter, up to 15 mm in height

Sample weight

Up to 100 g

Up to 300 g

XY sample positiniong range

5x5 mm

Positioning resolution

Readable resolution -5 um
Sensitivity -2 um

Scan range

100x100x10 um
3x3x2,6 um

100x100x10 um
50x50x5 um

Up to 200x200x20 um**(DualScan™mode)

Non linearity, XY
(with closed loop sensors)

≤ 0.1%

≤ 0.15%

Noise level, Z
(RMS in bandwidth 1000Hz)

With sensors

0.04 nm (typically),
≤ 0.06 nm

0.06 nm (typically),
≤ 0.07 nm

Without sensors

0.03 nm

0.05 nm

Noise level, XY***
(RMS in bandwidth 200Hz)

With sensors

0.2 nm (typically),
≤ 03 nm (XY 100 um)

0.1 nm (typically),
≤ 0.2 nm (XY 50 um)

Without sensors

0.02 nm (XY 100 um),
0.001 nm (XY 3 um)

0.01 nm (XY 50 um)

Linear dimension estimation error (with sensors)

±0.5%

±1.2%

Optical viewing system

Optical resolution

1 um (0.4 um optional, NA 0.7)****

3 um

Field of view

4.5 - 0.4 mm

2.0 - 0.4 mm

Continuous zoom

Available

Available

Vibration isolation

Active

0.7-1000 Hz

Passive

Above 1 kHz

* Scanning head can be configured to serve as a stand-alone device for specimens of unlimited sizes.
** Optionally can be expanded to 200x200x20 m.
*** Built-in capacitive sensors have extremely low noise and any area down to 50x50 nm can be scanned with closed-loop control.
**** High Resolution Viewing system (HRV head) is optional and provides additional functionality making it possible to generate and detect tip-localized aperture less near-field effects.

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Scanning Probe Microscope Ntegra Solaris

Product Features

  • New Shear Force head design offers:
    - 100x100x10 um scan range
    - High scanning llinearity owing to integrated position sensors
    - Easy-to use Reflection mode realization
  • The integrating of the inverted microscope objective into the central base becouse of high mechanical rigidity provides stability of the system making quality images and long-term experiments possible.
  • Reflection and Transmission modes are available.

Scanning Near-Field Microscopy

Shear Force Microscopy / SNOM reflection, transmission, luminescence (optional)/ any AFM modes are available optionally

Specification

Laser module

Wavelength*

441, 488, 514, 532, 633 nm

Coupling unit

X-Y-Z positioner, positioning accuracy 1 um

V-groove fiber holder

Coupling 40X objective

Shear Force Imaging

Sample size

Up to 100 mm in diameter,
up to 15 mm in height

XY sample positioning range

5x5 mm

Sample positioning accuracy

Readable resolution-5 um
Sensitivity-2 um

Closed-loop operation

Capacitive sensors for 3 axes

Scan range

Scanning by sample

100x100x25 um

Scanning by probe

100x100x7 um

Non-linearity, XY

Scanning by sample

0.03 % (typically)

Scanning by probe

< 0.15 %

Noise level, Z

Scanning by sample

< 0.2 nm (typically)

Scanning by probe

0.04 nm (typically), ≤ 0.06 nm

Noise level, XY

Scanning by sample

< 0.5 nm (typically)

Scanning by probe

0.2 nm (typically), ≤ 0.3 nm

Quartz tuning fork base frequency

190 kHz

Optical fiber diameter

90 um (for 480-550 nm), 125 um (for 600-680 nm)

Aperture diameter

< 100 nm

Channels for simultaneous registration

Reflection

Transmission/Fluorescence

PMT detectors (for each channel)

Spectral response

185-850 nm

Sensitivity at 420 nm

3x1010 V/W

Current-voltage conversion amplifier (built-in)

1x106V/A

Frequency band width

20kHz

High voltage power supply

Built-in

Vibration isolation

Active

0.7-1000 Hz

Passive

Above 1 kHz

* 488 nm laser is included as a default; other lasers can be supplied optionally.

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Scanning Probe Microscope Ntegra Spectra

Product Features

  • The universal PNL platform provides the possibility to integrate scanning confocal scheme in combination with regular AFM and spectrometer to detect Raman scattering spectrum. This spectra may then be interpreted into complex information concerning chemical composition of the object.
  • Substantially extending optical microscope and AFM possibilities laser equipped system would be indispensable in environmental sciences, material sciences, living cell investigations.

Confocal Microscopy

Optical module

Inverted or upright microscope direct viewing system

Housing with VIS optics (390-800nm)

Polarizer in illuminator channel with Glan-Taylor prism 390-1000nm – manual

Polarizer in detection channel with Glan-Taylor prism 390-1000nm – motorized

1/2 wave plate, motorized – 3 position

Beam splitter

Evanescent excitation option (for TERS)

Optical resolution

XY

200nm

Z

500nm

Scanning module

Sample weight

Up to 1000g

Scanning range

100x100x25 um

Closed-loop operation

Capacitive sensors for 3 axes

Non-linearity, XY

0.03 % (typically)

Noise level, Z

< 0.2 nm (typically)

Noise level, XY

< 0.5 nm (typically)

Pinhole

Variable from 0 to 1,5 mm, step size 0,5 um

Note that the sample for confocal microscopy can be either transparent or not and can be observed in air as well as in liquid environment.

Spectroscopy

Spectrometer focal length

520 mm

Laser wavelength*

441, 488, 514, 532, 633 nm

Stray light rejection

10-5 measured at 20 nm from 632 laser line

Flat field

28 mm x 10 mm

Spectral resolution

0.025 nm (1200 l/mm grating**)

Ports

1 input, 2 output

Grating mounts

4-position turret (3 gratings+mirror for "direct imaging" mode)

Detectors

CCD

Spectral response 200–1000 nm, thermoelectric cooling down to –80°C, 95 % quantum efficiency at 500 nm

Avalanche photodiode for photon counting***

Spectral response 400–1000 nm, dark counts = 25 counts/sec, supplied with PCI board with 1 GHz counting speed

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Scanning Probe Microscope Ntegra Therma

Product Features

  • Special Thermohead™ provides extremely low thermal drift (less than 10 nm/°C) ensuring high stability of the tip-sample system. This allows long-term measurements to be done in pre-defined point on the specimen surface.
  • Temperature control with sample temperature alteration is possible in the range of -30°C (Peltier element) to 200°C with the high temperature maintenance accuracy. It allows the observation of the structural changes on the specimen surface, such as crystallization, melting, growth processes, etc. with precise experiment conditions control.
  • Different liquid cells are available: hermetic chemically stable liquid flow cell with a possibility of the temperature control at elevated temperatures; closed liquid flow temperature controlled cell for operating with Petri dishes; replaceable heater.

Scanning Probe Microscopy

STM/ AFM (contact + semi-contact + non-contact) / Lateral Force Microscopy / Phase Imaging/Force Modulation/ Adhesion Force Imaging/ Magnetic Force Microscopy/ Electrostatic Force Microscopy/ Scanning Capacitance Microscopy/ Kelvin Probe Microscopy/ Spreading Resistance Imaging/ Lithography: AFM (Force and Current), STM

Specification

Scan type

Scanning by sample

Scanning by probe*

Sample size

Ambient environment

Up to 40 mm in diameter,
to 15 mm in height

Up to 100 mm in diameter, up to 15 mm in height

Heating or cooling

10x10x1.5 mm
15x12x1.5 mm

Up to 15x17x1.5 mm

XY sample positiniong range

5x5 mm

Positioning resolution

Readable resolution -5 um
Sensitivity -2 um

Temperature control

Range

From -30°C to +80°C/RT – +150 C

From RT to 300°C

Stability

±0.005 (typically),
≤ ±0.01°C

±0.01°C (typically),
≤ ±0.02°C

Scan range

-30°C - +80°C

10x10x5 um

-

Ambient conditions/ RT - +150°C

100x100x10um
3x3x2.6um

50x50x5um

RT - +300°C

-

50x50x5um

DualScan™ mode

Up to 150x150x15 um** (DualScan™ mode)

Thermal drift***
(typically)

XY

15 nm/°C

Z

10 nm/°C

Non linearity, XY
(with closed loop sensors)

≤ 0.1%

≤ 0.15%

Noise level, Z
(RMS in bandwidth 1000Hz)

With sensors

0.04 nm(typically),
≤ 0.06 nm

0.06 nm(typically),
≤ 0.07 nm

Without sensors

0.03 nm

0.05 nm

Noise level, XY****
(RMS in bandwidth 200Hz)

With sensors

0.2 nm (typically),
≤ 0.3 nm (XY 100 um)
0.025 nm(typically),
≤ 0.04 nm (XY 10 um)

0.1 nm (typically),
≤ 0.2 nm

Without sensors

0.02 nm(XY 100 um),
0.002 nm(XY 10 um),
0.001 nm (XY 3 um)

0.01 nm

Linear dimension estimation error
(with sensors)

±0.5%

±1.2%

Optical viewing system

Optical resolution

1 um/3 um

3 um

Field of view

4.5-0.4 mm

2.0-0.4 mm

Continuous zoom

Available

Available

Vibration isolation

Active

0.7-1000 Hz

Passive

Above 1 kHz

Scanning head can be configured to serve as a stand-alone device for specimens of unlimited sizes.
** Optionally can be expanded to 200x200x20 m.
*** For temperature range –30°C – +80°C
**** Built-in capacitive sensors have extremely low noise and any area down to 50x50 nm can be scanned with closed-loop control.

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Scanning Probe Microscope Ntegra Tomo

Product Features

  • Leica EM UC6 Ultramicrotome makes nanoslices of a sample and a freshly cut surface is then measured by AFM. Thus, many physical properties of a surface are studied and 3D-volume imaging is available after the reconstruction.
  • After the NTEGRA Tomo operation sample slices stay available for TEM analysis

Scanning Probe Microscopy

in-situ: AFM (contact + semi-contact + non-contact) / Lateral Force Microscopy / Phase Imaging/Force Modulation/ Adhesion Force Imaging/ Magnetic Force Microscopy/ Electrostatic Force Microscopy / Scanning Capacitance Microscopy/ Kelvin Probe Microscopy/ Spreading Resistance Imaging/ Lithography: AFM (Force and Current)

Sample size

Up to 8 mm in diameter,
up to 15 mm in height

Sample weight

Up to 10 g

Scan range

50x50x5 um

Positioning resolution

Readable resolution -5 um
Sensitivity-2 um

Non-linearity, XY

< 0.15%

Noise level, Z
(RMS in bandwidth 1000 Hz)

0.06 nm (typically), ≤ 0.07 nm

Noise level, XY
(RMS in bandwidth 200 Hz)

0.1 nm (typically), ≤ 0.2 nm

Vibration isolation

Dynamic

Frequency range 0.7 – 1000 Hz

Passive

For frequencies above 1 kHz

 

Ultratomy

Self locking

Yes

Graduation

±30° graduation

Clearance angle adjustment

-2° to 15° with 1°scale

Knife holder

For 6-12 mm knives

Coarse knifemovements

N-S

10 mm stepping motor

E-W

25 mm stepping motor

Cutting window

0.2-15 mm adjustable

Cutting speed

0.05-100 mm/s wheel contr.

Section thickness

0-15000 nm wheel contr.

FEED / SPEED storage

5

Return speeds

10, 30, 50 mm/s

Step control

0.1-15 m steps

Section counter

Yes

Feed totalizer

Yes

Count down

Yes

Rocking mode

Yes

E-W measurement

Yes

Auto trim

Yes

Specimen advance indicator

Yes

Working distance

110 mm

Universal specimen holder

2pcs.

Flat specimen holder

1p.

Instrument table

Dimensions

Shock-absorbing elements

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Scanning Probe Microscope Ntegra Vita

The integrating of the inverted microscope objective into the central base becouse of high mechanical rigidity provides stability of the system making quality images and long-term experiments possible. Inverted optical microscope stability is not so important any more.

Product Features

  • Different liquid cells are available: hermetic chemically stable liquid flow cell with a possibility of the temperature control at elevated temperatures; closed liquid flow temperature controlled cell for operating with Petri dishes; replaceable heater.
  • Hermetic liquid cell (MP4LCNTF)
    - Flow-through possibility and heating (up to 60oC stability ~0,05°C)
    - Control and changing of biochemical environment in solution during measurements
    - Range of sample positioning 1x1 mm, positioning resolution 5 um.
    - Chemically stable materials (stainless steel, fluoroplast) allow operation in aggressive solvents such as H2SO4, HCl.
  • Quasi-hermetic liquid cell for Petri dishes (MP5LCNTF)
    - Flow-through possibility and heating up to 50°C.
    - Range of sample positioning 1x1 mm, positioning resolution 5 um.
    - Removable heater for the separate cleaning. The heater and the temperature control sensor are located inside the fluoroplastic tube.
    - Changeable probe holder with a glass prism and a silastic membrane

Scanning Probe Microscopy

SPM methods

in air & liquid

AFM (contact + semi-contact + non-contact) / Lateral Force Microscopy / Adhesion Force Imaging/ Force Modulation/ Phase Imaging/ AFM Lithography (scratching)/ Force- Distance curves

in air only

STM/ Magnetic Force Microscopy/ Electrostatic Force Microscopy / Scanning Capacitance Microscopy/ Kelvin Probe Microscopy/ Spreading Resistance Imaging/ Lithography: AFM (Current), STM

 

Scanning by sample

Scanning by probe*

Sample size

in air

40 mm in diameter,
15 mm in height

100 mm in diameter,
15 mm in height

in liquid

Up to 14x14x2.5 mm

Up to 15x15x3 mm

XY sample positioning range

in air

5x5 mm, readable resolution -5 um
sensitivity -2 um

in liquid

1x1 mm, readable resolution -5 um
sensitivity-2 um

Scan range

100x100x10 um, 3x3x2.6 um
100x100x10 um, 50x50x5 um

Up to 200x200x20 um** (DualScan™ mode)

Non-linearity, XY
(with closed-loop sensors***)

< 0.1%

< 0.15%

Noise level, Z
(RMS in bandwidth 1000 Hz)

With sensors

0.04 nm (typically),
≤ 0.06 nm

0.06 nm (typically),
≤ 0.07 nm

Without sensors

0.03 nm

0.05 nm

Noise level, XY***
(RMS in bandwidth 200 Hz)

With sensors

0.2 nm (typically),
≤ 0.3 nm (XY 100 um)

0.1 nm (typically),
≤ 0.2 nm (XY 50 um)

Without sensors

0.02 nm (XY 100 um)
0.001 nm (XY 3 um)

0.01 nm (XY 50 um)

Temperature control
(For operation in fluid environment)

Range

-

from RT to 60°C

Stability

-

≤ ±0.01°C

*Scanning head can be configured to serve as a stand-alone device for specimens of unlimited sizes.
** 200 m scan range is possible with the unique DualScan™ mode when scanning by sample and scanning by probe can be done simultaneously.
*** Built-in capacitive sensors have extremely low noise and any area down to 50x50 nm can be scanned with closed-loop control.

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