Scanning Probe Microscopy

AFM (contact + semi-contact + non-contact) / Lateral Force Microscopy / Phase Imaging/Force Modulation/ Adhesion Force Imaging/ Magnetic Force Microscopy/ Electrostatic Force Microscopy / Scanning Capacitance Microscopy/ Kelvin Probe Microscopy/ Spreading Resistance Imaging/ Lithography: AFM (Force and Current)

Specification

Sample size

Up to 100 mm in diameter, up to 15 mm in height

Sample weight

Up to 1 kg

XY sample positiniong range

Linear movement range

50 mm

Positioning resolution

2.5 um

Rotary movement range

360°

Positioning resolution

0.005°

Scan range

50x50x5 um

Sample holder

Vacuum chuck

Non-linearity, XY
(with closed-loop sensors)

≤ 0.15%

Noise level, Z
(RMS in bandwidth 1000Hz)

With sensors

0.06 nm (typically), ≤ 0.07 nm

Without sensors

0.05 nm

Noise level, XY*
(RMS in bandwidth 200Hz)

With sensors

0.1 nm (typically), ≤ 0.2 nm

Without sensors

0.01 nm

Linear dimension estimation error
(with sensors)

±0.5%

Optical viewing system

Optical resolution

1 um/3 um

Field of view

4.5-0.4 mm

Continuous zoom

Available

Vibration isolation

Active

0.7-1000 Hz

Passive

Above 1 kHz