Scanning Probe Microscopy |
in-situ: AFM (contact + semi-contact + non-contact) / Lateral Force Microscopy / Phase Imaging/Force Modulation/ Adhesion Force Imaging/ Magnetic Force Microscopy/ Electrostatic Force Microscopy / Scanning Capacitance Microscopy/ Kelvin Probe Microscopy/ Spreading Resistance Imaging/ Lithography: AFM (Force and Current) |
Sample size |
Up to 8 mm in diameter,
up to 15 mm in height |
Sample weight |
Up to 10 g |
Scan range |
50x50x5 um |
Positioning resolution |
Readable resolution -5 um
Sensitivity-2 um |
Non-linearity, XY |
< 0.15% |
Noise level, Z
(RMS in bandwidth 1000 Hz) |
0.06 nm (typically), ≤ 0.07 nm |
Noise level, XY
(RMS in bandwidth 200 Hz) |
0.1 nm (typically), ≤ 0.2 nm |
Vibration isolation |
Dynamic |
Frequency range 0.7 – 1000 Hz |
Passive |
For frequencies above 1 kHz |