Scanning Probe Microscope Ntegra Prima

Product Features

  • Equipped with a replaceable scanner with integrated capacitance sensors. A scan range of 100x100x12 um is available.
  • XY nonlinearity: 0.05% of Peak-to-Peak by 2 value, after correction.
  • Position repeatability in the X-Y plane is maintained with an accuracy of 10-20 nm in full scan range.
  • The DualScan mode is performed with the use of the replaceable lower scanner (100x100x12 um) and another (100x100x10 um) upper scanner, which gives the total scan range of 200x200x22 um.
  • The PNL controller and the mechanical parts of the PNL NTEGRA can operate in high-frequency modes, up to 5 MHz. This makes it possible to use the system both for AFAM applications and for operations with high-frequency cantilevers.
  • This system can be used in research of high-resistance materials such as thin dielectric layers on semiconductors, DLC and piezo-films, conductive polymers etc.

Scanning probe Microscopy

In air&liquid: AFM (contact + semi-contact + non-contact) / Lateral Force Microscopy / Phase Imaging/ Force Modulation/ Adhesion Force Imaging/ Lithography: AFM (Force) In air only: STM/ Magnetic Force Microscopy/ Electrostatic Force Microscopy/ Scanning Capacitance Microscopy/ Kelvin Probe Microscopy/ Spreading Resistance Imaging/ Lithography: AFM (Current), STM/ AFAM (optional)

Specification

Scan type

Scanning by sample

Scanning by probe*

Sample size

Up to 40 mm in diameter, to 15 mm in height

Up to 100 mm in diameter, up to 15 mm in height

Sample weight

Up to 100 g

Up to 300 g

XY sample positiniong range

5x5 mm

Positioning resolution

Readable resolution -5 um
Sensitivity -2 um

Scan range

100x100x10 um
3x3x2,6 um

100x100x10 um
50x50x5 um

Up to 200x200x20 um**(DualScan™mode)

Non linearity, XY
(with closed loop sensors)

≤ 0.1%

≤ 0.15%

Noise level, Z
(RMS in bandwidth 1000Hz)

With sensors

0.04 nm (typically),
≤ 0.06 nm

0.06 nm (typically),
≤ 0.07 nm

Without sensors

0.03 nm

0.05 nm

Noise level, XY***
(RMS in bandwidth 200Hz)

With sensors

0.2 nm (typically),
≤ 03 nm (XY 100 um)

0.1 nm (typically),
≤ 0.2 nm (XY 50 um)

Without sensors

0.02 nm (XY 100 um),
0.001 nm (XY 3 um)

0.01 nm (XY 50 um)

Linear dimension estimation error (with sensors)

±0.5%

±1.2%

Optical viewing system

Optical resolution

1 um (0.4 um optional, NA 0.7)****

3 um

Field of view

4.5 - 0.4 mm

2.0 - 0.4 mm

Continuous zoom

Available

Available

Vibration isolation

Active

0.7-1000 Hz

Passive

Above 1 kHz

* Scanning head can be configured to serve as a stand-alone device for specimens of unlimited sizes.
** Optionally can be expanded to 200x200x20 m.
*** Built-in capacitive sensors have extremely low noise and any area down to 50x50 nm can be scanned with closed-loop control.
**** High Resolution Viewing system (HRV head) is optional and provides additional functionality making it possible to generate and detect tip-localized aperture less near-field effects.

Seek Inter Corporation Limited.
53/69 Sukhumvit 103 Nongbon Praves Bangkok 10260 Thailand
Tel. (662)7472155 Fax (662) 7473155
E-mail : sales@seekscope.com
Website : http://www.seekscope.com