Scanning Probe Microscopy

STM/ AFM (contact + semi-contact + non-contact) / Lateral Force Microscopy / Phase Imaging/Force Modulation/ Adhesion Force Imaging/ Magnetic Force Microscopy/ Electrostatic Force Microscopy/ Scanning Capacitance Microscopy/ Kelvin Probe Microscopy/ Spreading Resistance Imaging/ Lithography: AFM (Force and Current), STM

Specification

Scan type

Scanning by sample

Scanning by probe*

Sample size

Ambient environment

Up to 40 mm in diameter,
to 15 mm in height

Up to 100 mm in diameter, up to 15 mm in height

Heating or cooling

10x10x1.5 mm
15x12x1.5 mm

Up to 15x17x1.5 mm

XY sample positiniong range

5x5 mm

Positioning resolution

Readable resolution -5 um
Sensitivity -2 um

Temperature control

Range

From -30°C to +80°C/RT – +150 C

From RT to 300°C

Stability

±0.005 (typically),
≤ ±0.01°C

±0.01°C (typically),
≤ ±0.02°C

Scan range

-30°C - +80°C

10x10x5 um

-

Ambient conditions/ RT - +150°C

100x100x10um
3x3x2.6um

50x50x5um

RT - +300°C

-

50x50x5um

DualScan™ mode

Up to 150x150x15 um** (DualScan™ mode)

Thermal drift***
(typically)

XY

15 nm/°C

Z

10 nm/°C

Non linearity, XY
(with closed loop sensors)

≤ 0.1%

≤ 0.15%

Noise level, Z
(RMS in bandwidth 1000Hz)

With sensors

0.04 nm(typically),
≤ 0.06 nm

0.06 nm(typically),
≤ 0.07 nm

Without sensors

0.03 nm

0.05 nm

Noise level, XY****
(RMS in bandwidth 200Hz)

With sensors

0.2 nm (typically),
≤ 0.3 nm (XY 100 um)
0.025 nm(typically),
≤ 0.04 nm (XY 10 um)

0.1 nm (typically),
≤ 0.2 nm

Without sensors

0.02 nm(XY 100 um),
0.002 nm(XY 10 um),
0.001 nm (XY 3 um)

0.01 nm

Linear dimension estimation error
(with sensors)

±0.5%

±1.2%

Optical viewing system

Optical resolution

1 um/3 um

3 um

Field of view

4.5-0.4 mm

2.0-0.4 mm

Continuous zoom

Available

Available

Vibration isolation

Active

0.7-1000 Hz

Passive

Above 1 kHz